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Low pressure discharge
From Wikipedia, the free encyclopedia
Low pressure discharges are those that have gas pressures from a few millitorr to a little less than atmopheric. They have the benefit of less power requirement of sustenance of the discharge as volume recombination rates are lower.
It is easier to achieve uniform discharges a low pressure. Normally, the system is pumped down and only necessary plasma gases are then flown into the plasma chamber. Argon is a typical background gas because it has low ionization potential and therefore is easier to breakdown and sustain.
Most discharges used in the semiconductor industry employ low-pressure plasmas.
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