Scanning probe microscopy

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Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. An image of the surface is obtained by mechanically moving the probe in a raster scan of the specimen, line by line, and recording the probe-surface interaction as a function of position. SPM was founded with the invention of the scanning tunneling microscope in 1981.

Many scanning probe microscopes can image several interactions simultaneously. The manner of using these interactions to obtain an image is generally called a mode.

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  • The resolution of the microscopes is not limited by diffraction, but only by the size of the probe-sample interaction volume (i.e., point spread function), which can be as small as a few picometres.
  • The interaction can be used to modify the sample to create small structures (nanolithography).

  • The scanning techniques are generally slower in acquiring images, due to the scanning process. As a result, efforts are being made to greatly improve the scanning rate.
  • The maximum image size is generally smaller.

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